|Name||Mr. Ian Germaine|
|Organization or Institution||University of Florida|
Aerosol-Assisted Chemical Vapor Deposition of Molybdenum Disulfide From cis-Mo(CO)4(tetramethylthiourea)2
Ian M. Germaine, Matthew Alderman, Mary B. Huttel, and Lisa McElwee-White
University of Florida
A molybdenum carbonyl tetramethylthiourea (TMTU) complex, cis-Mo(CO)4(TMTU)2, has been used successfully as a single-source precursor to deposit a molybdenum disulfide (MoS2) thin film via aerosol-assisted chemical vapor deposition (AACVD). The film has been characterized using Raman Spectroscopy, Scanning Electron Microscopy, and Energy Dispersive X-ray Spectroscopy. Decomposition byproducts of the complex have been detected using Gas Chromatography / Mass Spectrometry to elucidate the decomposition mechanism of the precursor.