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NameMr. Ian Germaine
Organization or InstitutionUniversity of Florida
TopicInorganic Chemistry

Aerosol-Assisted Chemical Vapor Deposition of Molybdenum Disulfide From cis-Mo(CO)4(tetramethylthiourea)2



Ian M. Germaine, Matthew Alderman, Mary B. Huttel, and Lisa McElwee-White


Author Institution(s)

University of Florida


A molybdenum carbonyl tetramethylthiourea (TMTU) complex, cis-Mo(CO)4(TMTU)2, has been used successfully as a single-source precursor to deposit a molybdenum disulfide (MoS2) thin film via aerosol-assisted chemical vapor deposition (AACVD). The film has been characterized using Raman Spectroscopy, Scanning Electron Microscopy, and Energy Dispersive X-ray Spectroscopy. Decomposition byproducts of the complex have been detected using Gas Chromatography / Mass Spectrometry to elucidate the decomposition mechanism of the precursor.